Chapter
84 Chapter 84 : Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof
Heading
8486 Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 9 (C) to this Chapter; parts and accessories.
Subheading
848620 - Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits:
AHTN Code
- - Film formation equipment:
84862013 - - - Apparatus for physical deposition by sputtering on semiconductor wafers; physical deposition apparatus for semiconductor production
Local Code
8486201300 - - - Apparatus for physical deposition by sputtering on semiconductor wafers; physical deposition apparatus for semiconductor production