Chapter
84 Chapter 84 : Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof
Heading
8486 Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 9 (C) to this Chapter; parts and accessories.
Subheading
848610 - Machines and apparatus for the manufacture of boules or wafers:
AHTN Code
84861030 - - Machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers
Local Code
8486103000 - - Machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers