Chapter
84 Chapter 84 : Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof
Heading
8486 Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 9 (C) to this Chapter; parts and accessories.
Subheading
848690 - Parts and accessories:
AHTN Code
- - - Of apparatus for dry etching patterns on flat panel display substrates
84869035 - - - Of spinners for coating photosensitive emulsions on flat panel display substrates
Local Code
8486903500 - - - Of spinners for coating photosensitive emulsions on flat panel display substrates