Chapter
84 Chapter 84 : Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof
Heading
8486 Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 9 (C) to this Chapter; parts and accessories.
Subheading
848640 - Machines and apparatus specified in Note 9 (C) to this Chapter:
AHTN Code
84864060 - - Electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles
Local Code
8486406000 - - Electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles